A HIGH SPEED measurement tool for SEMICONDUCTOR device applications
The Solarius BGA Metrology System measures and characterizes the parameters of singulated semiconductor devices. This fast 3D optical measurement tool is ideal for quality assurance and process control and is built to common semiconductor industry standards.
- Easy to automate
- Ultra fast non-contact measurement
- Perfect for online inspection
- Customized recipes and algorithms
- Customized data analysis
- JEDEC or wafer capable
- SEMI S2/S8 compliant
The BGA platform is a self-contained application specific metrology unit. It includes a fast non-contact confocal chromatic line sensor with a 3D measurement rate of several hundred thousand points per second at nanometric scale resolution. The BGA also includes a nanoprecision XY stage with a measuring range up to 400 mm x 400 mm as well as a vibration isolated platform. Proprietary analysis algorithms are available to provide customized data analysis.